We investigate single domain beta-SiC(100)-(3 x 2) surfaces (Si rich)
by atom resolved scanning tunneling microscopy (filled and empty elect
ronic states). Flat and high-quality surfaces having a low density of
defects are grown with first identification of individual Si atoms and
dimers. Si-Si dimers form rows perpendicular to the dimer direction i
n a (3 x 2) atomic arrangement with clear evidence of asymmetric dimer
s all tilted in the same direction (i.e., not anticorrelated). Several
types of defects are identified including primarily missing dimers an
d dimer pairs. Addition Si is grown epitaxially with two-dimensional i
sland formation having the (3 x 2) reconstruction.