Jd. Bukowski et al., 2-DIMENSIONAL FLUID MODEL OF AN INDUCTIVELY-COUPLED PLASMA WITH COMPARISON TO EXPERIMENTAL SPATIAL PROFILES, Journal of applied physics, 80(5), 1996, pp. 2614-2623
A key need for the development and testing of models suitable for chem
ically active, low pressure plasmas is detailed comparisons between mo
del predictions and experimental measurements. In this paper, a two-di
mensional, axisymmetric fluid model of an inductively coupled plasma i
s described, and model predictions are compared to the experimental me
asurements of P. A. Miller, G. A. Hebner, K. E. Greenberg, P. D. Pocha
n, and B. P. Aragon [J. Res. Natl. Inst. Stand. Technol. 100, 427 (199
5)] of electron density, electron temperature, and plasma potential. C
omparisons between model predictions and experimental measurements wer
e made in argon and chlorine discharges. Qualitative to semiquantitati
ve agreement between the model predictions and experimental diagnostic
s was observed, suggesting that assumptions made in the model are reas
onably accurate. (C) 1996 American Institute of Physics.