2-DIMENSIONAL FLUID MODEL OF AN INDUCTIVELY-COUPLED PLASMA WITH COMPARISON TO EXPERIMENTAL SPATIAL PROFILES

A key need for the development and testing of models suitable for chem ically active, low pressure plasmas is detailed comparisons between mo del predictions and experimental measurements. In this paper, a two-di mensional, axisymmetric fluid model of an inductively coupled plasma i s described, and model predictions are compared to the experimental me asurements of P. A. Miller, G. A. Hebner, K. E. Greenberg, P. D. Pocha n, and B. P. Aragon [J. Res. Natl. Inst. Stand. Technol. 100, 427 (199 5)] of electron density, electron temperature, and plasma potential. C omparisons between model predictions and experimental measurements wer e made in argon and chlorine discharges. Qualitative to semiquantitati ve agreement between the model predictions and experimental diagnostic s was observed, suggesting that assumptions made in the model are reas onably accurate. (C) 1996 American Institute of Physics.