THERMAL-STABILITY OF DIAMOND-LIKE CARBON-FILMS

IR and UV-VIS optical spectroscopy have been used to study the transfo rmations of the properties of diamondlike carbon films following isoth ermal anneals from T-a=300 to 650 degrees C. Several processes due to the annealing have been observed: (1) the increase of the absorption d ue to vibrations of unsaturated bonds of C(sp(2)) atoms at similar to 1600 cm(-1) for T-a greater than or equal to 350 degrees C, (2) the de crease of the absorption due to C(sp(3))-H bonds at T-a greater than o r equal to 350 degrees C, and (3) the reduction of the optical energy gap. Analysis of the kinetics has shown that the dehydrogenation of th e alloys and the formation of unsaturated bonds may proceed independen tly. The reduction of the energy gap is related to the formation of C( sp(2)) atoms with unsaturated bonding which occurs mostly in hydrogen- free regions. Intensive graphitization of the films occurs above T-a=6 50 degrees C. Transformations of C-H bonds are proposed to occur via f ast rearrangement in stressed regions leading to formation of new C(sp (2))-H bonds and formation of methane molecules as the most important product of the anneals inside the polymeric highly hydrogenated region s in the alloys. It appears that both bond removal and reordering have taken place as a result of annealing. (C) 1996 American Institute of Physics.