Submicron feature size InGaAs metal-semiconductor-metal (MSM) photodet
ectors with 3-dB bandwidths in excess of 40 GHz are demonstrated, Devi
ces with a 0.3-mu m-thick active layer and an interelectrode spacing o
f less than or equal to 0.5 mu m show a roll-off of the frequency resp
onse of less than or equal to 2 dB up to 40 GHz when operated at 5-V b
ias under front illumination with 1.3-mu m light.