DETERMINATION OF GRAIN-SIZE IN INDIUM TIN OXIDE-FILMS FROM TRANSMISSION MEASUREMENTS

The grain size of In2O3:Sn thin films on transparent substrates is det ermined. The method employs the ratio of specular to total transmissio n to deduce the film grain size. Interpretation of these data is accom plished with the aid of Bhattacharyya et al.'s model [Vacuum 43, 1201 (1992)] of a polycrystalline thin film. This is combined with knowledg e of scattering cross-correlation laws. Finally, a simple correction i s derived for the scattering contribution from the substrate. Although approximate, the results for the grain size obtained by the reported optical method and by scanning electron microscopy were in agreement w ithin experimental uncertainties. (C) 1996 Optical Society of America