EFFECTS OF SURFACE COMPRESSION STRENGTHENING ON PROPERTIES OF INDIUM TIN OXIDE-FILMS DEPOSITED ON AUTOMOBILE GLASS

Indium tin oxide (ITO) films were deposited onto automobile glass subs trates with de reactive sputtering and ion-assisted e-beam-gun evapora tion processes. The ITO-coated glass samples were then strengthened th rough a surface compression strengthening process that included heatin g the glass at 650 degrees C for 5 min and rapidly cooling the exterio r of the hot glass with air jets. The deterioration of electrical and optical properties of the ITO films on automobile safety glass was fou nd during the heating stage of the When a layer of SiO2 barrier was ad ded, the property deterioration could be significantly reduced. The mo st effective barrier thickness was found near 60 nm, which resulted in no appreciable property loss. (C) 1996 Optical Society of America