A 33-CM-DIAGONAL HIGH-RESOLUTION TFT-LCD WITH FULLY SELF-ALIGNED A-SITFTS

A 33-cm-Diagonal High-Resolution (1280 x 1024 x RGB, which stands for red, green, and blue) TFT-LCD with low, uniform parasitic capacitance between gate electrodes and source/drain electrodes has been developed using Fully Self-Aligned a-Si TFTs. The fabricated TFT-LCD shows no v isible seams between block shot exposure regions, even in the display of gray images. In this paper, we describe (1) our full self-alignment technology for the TFTs, including the fabrication process and the te chnology for reducing OFF current in the TFTs under illumination, (2) SPICE simulation for estimating pixel voltage shift in the fabricated TFT-LCD, and (3) performance results for the fabricated TFT-LCD.