The role of step fluctuations in surface reactions is explored. Activa
tion energies for various processes relevant to the production of vaca
ncies at steps on the Cu(100) surface are calculated in the second-mom
ent approximation of the tight-binding scheme. Productions rates for v
acancies are calculated analytically and by means of Monte Carlo simul
ations. For the specific system of manganese incorporation into the Cu
(100) surface, it is shown that manganese is effectively incorporated
at step edges due to the step fluctuations. The migration of the incor
porated manganese away from the steps is mediated by the vacancies pro
duced at the steps. Comparison to recent experimental results on the i
ncorporation pattern on differently oriented steps suggests that excha
nge processes at steps may also play a role in surface alloy formation
.