INVESTIGATION OF THERMAL-PROPERTIES OF RUTHENIUM(III) BETA-DIKETONATEPRECURSORS FOR PREPARATION OF RUO2 FILMS BY CVD

By means of a tensimetric flow method and a static method with a silic a-membrane zero gauge, the dependence of vapour pressure on temperatur e was obtained for tris(2,4-pentanedionato)ruthenium(III), Ru(aa)(3), and 1,1,1-trifluoropentane-2,4-dionato)ruthenium(III), Ru(tfa)(3). The thermodynamic characteristics of vaporization and sublimation of thes e complexes were determined. The processes of thermal decomposition of the vapour of the compounds in vacuum, hydrogen and oxygen were inves tigated by using mass spectrometry in the temperature range 170-550 de grees C for Ru(aa)(3) and 150-620 degrees C for Ru(tfa)(3). The thresh old temperatures of the stability of the vapour of the complexes and t he rate constants of the thermolysis processes were determined. The ma in gaseous products of the thermal decomposition and the dependences o f their composition on the presence of hydrogen and oxygen were establ ished.