SCANNING-TUNNELING-MICROSCOPY STUDY OF MONOLAYER PIT FORMATION ON THEHOPG SURFACE USING OXYGEN PLASMA AND THERMAL-OXIDATION

Authors
ABE T HANE K OKUMA S
Citation
T. Abe et al., SCANNING-TUNNELING-MICROSCOPY STUDY OF MONOLAYER PIT FORMATION ON THEHOPG SURFACE USING OXYGEN PLASMA AND THERMAL-OXIDATION, International journal of the Japan Society for Precision Engineering, 30(2), 1996, pp. 118-121
Citations number
11
Categorie Soggetti
Engineering, Mechanical
Journal title
International journal of the Japan Society for Precision Engineering → ACNP
ISSN journal
0916782X
Volume
30
Issue
2
Year of publication
1996
Pages
118 - 121
Database
ISI
SICI code
0916-782X(1996)30:2<118:SSOMPF>2.0.ZU;2-8
Abstract
Thermal oxidation of highly oriented pyrolytic graphite (HOPG) surface treated with an oxygen plasma was studied using scanning tunneling mi croscopy (STM). At the temperature of 500 degrees C, many channels wer e observed on the surface, however the circular pits which are fabrica ted by the thermal oxidation were not observed. At the temperature of 600 degrees C, the tailed pits were fabricated on the surface. Large n umber of pits were fabricated on the HOPG surface by the proposed tech nique.