DETERMINATION OF CRYSTALLITE PROPAGATION IN LASER ANNEALED AMORPHOUS-SILICON BY NORMAL INCIDENCE SPECTRAL REFLECTANCE

Analysis of normal incidence spectral reflectivity of excimer laser an nealed alpha-Si:H shows that the annealed material can be modeled as a stratified system comprising a large-grained polycrystalline layer, a fine grained polycrystalline layer, and residual amorphous silicon in agreement with transmission electron microscopy. Optically, the large -grained poly-Si behaves as single-crystal silicon and the fine-graine d material is modeled, using effective medium theory, as a mixture of single-crystal silicon and amorphous silicon. (C) 1996 American Instit ute of Physics.