PIC MC MODELING OF AN ION-SOURCE - CASE-STUDY

Kinetic simulations on the basis of the PIC/MC code allow for the self -consistent kinetic simulation of gas discharges under conditions wher e other simulation methods fail. We present a case study of a low pres sure asymmetric magnetized capacitively coupled RF discharge. The one- dimensional treatment of the system can be extended to model ion extra ction in the axial direction from this discharge, thus simulating an i on source. We present results on the properties of the sheath and bulk regions, on the efficiency of the extraction, and on the dependence o f the power balance of the discharge, the magnetic field and the wall material.