DESCRIPTION OF AN ELECTROSTATIC FORCE NAN OINDENTER

In this paper is presented a new apparatus for the mechanical characte rization of thin films and coatings, under very low loads. In the pres ent state, the penetration depth can be obtained, in normal conditions , with an accuracy of a few Angstroms. The electrostatic applied force ranges between 10(-7) N and 0.2 N. Through the use of piezoelectric t ransducers indents can be localized with an accuracy of a few nanomete rs. The design makes the apparatus practically insensitive to thermal drift and the compactness of the mechanical part lowers the effect of parasitic mechanical vibrations.