When adsorbed oxygen ions react with introduced reducing gas molecules
, the fraction of densities of reacted oxygens and originally adsorbed
oxygens was assumed to correspond to the fraction of surface occupied
by introduced gas molecules used in the Langmuir equation. According
to Boltzmann statistics and Langmuir equation, we obtain an analytic e
xpression of sensitivity of sensor as a function of concentration of r
educing gas, heating temperature and material parameters. The theoreti
cal results are in good agreement with the experimental data which has
been reported on ZnO and SnO2 sensor.