IDENTIFICATION OF WATER-MOLECULES IN LOW HUMIDITY AND POSSIBILITY OF QUANTITATIVE GAS-ANALYSIS USING POROUS SILICON GAS SENSOR

In a previous experiment, it was shown that a gas identification senso r using porous silicon necessitated more than 60% concentration for id entification. In the present study, it was shown by means of an experi ment using water vapor that the concentration limit for gas identifica tion may be controlled by changing the sensor temperature. In addition , the possibility of quantitative analysis of gas identification in wh ich the sensor temperature is taken as a new parameter was proposed.