EFFECT OF O-2(-1CUNOY SUPERCONDUCTING FILMS IN RF MAGNETRON SPUTTERING() AND O+ ON THE GROWTH OF BI2SR2CAN)

We investigated the effect of ionized oxygen molecules (O-2(+)) and at oms (O+) on the film growth of Bi2Sr2Can-1CunOy (BSCCO). O-2(+) and O were effectively produced using He + O-2 sputtering gas, and O-2(+) m ainly sputtered the target. The maximum O-2(+) content was obtained at a He gas mixture ratio of about 80%, at which BSCCO films with the hi ghest critical temperature (T-c) and a (2223)-phase were obtained. By supplying O-2(+) and O+ during the deposition of the films, the superc onductivity of the films was improved and the optimum substrate temper ature for obtaining the film with the highest T-c in He + O-2 sputteri ng gas became lower than that in Ar + O-2 sputtering gas.