Electron spin resonance (ESR) study of E' centers in crushed quartz (S
iO2) indicated the formation of a new type of E' center by UV-irradiat
ion. On the other hand, the concentration of E' centers formed by gamm
a-irradiation in the crushed quartz is reduced by UV-irradiation. It w
as possible to distinguish between the three types of E' centers in cr
ushed quartz (E'(c): formed simply by crushing, E'(UV): formed by crus
hing and UV-irradiation and E'(gamma): formed by crushing and gamma-ir
radiation) using UV-irradiation. The distribution of the activation en
ergy of the E' centers just after crushing was revealed by annealing e
xperiments and computer simulation. The technique of characterization
by UV-irradiation will be useful for evaluating the local strain in Si
O2, especially in natural quartz.