ELECTRON HEATING IN INDUCTIVELY-COUPLED DISCHARGES

An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that nu similar to omega. Here, nu is the e lectron collision frequency, and omega is the frequency of the driven current inside the antenna coil. The expression is valid for both coll isional and collisionless discharges, and can be employed in the model ing of the source. (C) 1996 American Institute of Physics.