SOME LIMITATIONS OF SURFACE PROFILE RECONSTRUCTION IN SCANNING ELECTRON-MICROSCOPY

This paper is a contribution to development of electron beam profilogr aphy based on the so called ''shape from shading'' technique. A new fo rmula of signal processing in a two detector system has been proposed. The formula cn be applied to all the signals showing Lambert's angula r distribution. The signal processing may be realized in ''real time'' in a simple analog processing system. However, an accuracy of the pro files is limited by numerous errors, mainly by shadowing effects. As t he shadowing causes disturbances of the signal now, a proper design of the detection system is necessary to reduce the errors.