In this study the growth of Fe/Ag and Pd/Cu multilayers is investigate
d by using a molecular dynamics simulation method. In-plane and out-of
-plane motions of the deposited atoms are observed for temperatures in
the range 10 K-330 K. Furthermore the film structure shows a remarkab
le dependence on the deposition rate and temperature and these paramet
ers may turn the growth from amorphous, or highly defective, to crysta
lline with defective interfaces. In this transition, however, the type
of atom to be deposited plays a primary role and in our study a remar
kable propensity of Fe for amorphization has been observed.