KINETIC REGULARITIES OF MONOSILANE PYROLYSIS AND THE ROLE OF REACTIONCHAINS

On studying thermal decomposition of monosilane, the time dependence o f the light absorption in various regions of the visible spectrum was recorded, and the critical character of the transition from one to ano ther regime of the reaction yielding the end pyrolysis products in the form of a film or aerosol was revealed. The heterogeneous-homogeneous chain process is shown to be responsible for the self-acceleration ob served in the course of monosilane decomposition under indicated regim es of phase formation. A mean chain length of the nonbranched reaction is estimated. A nonmonotonous behavior of the reaction rate dependenc e on the specific surface area at various initial temperatures is acco unted for within a context of a chain reaction mechanism.