HYBRID INTEGRATION OF 8-CHANNEL PD-ARRAY ON SILICA-BASED PLC USING MICRO-MIRROR FABRICATION TECHNIQUE

Authors
TERUI H SHIMOKOZONO M YANAGISAWA M HASHIMOTO T YAMADA Y HORIGUCHI M
Citation
H. Terui et al., HYBRID INTEGRATION OF 8-CHANNEL PD-ARRAY ON SILICA-BASED PLC USING MICRO-MIRROR FABRICATION TECHNIQUE, Electronics Letters, 32(18), 1996, pp. 1662-1664
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
32
Issue
18
Year of publication
1996
Pages
1662 - 1664
Database
ISI
SICI code
0013-5194(1996)32:18<1662:HIO8PO>2.0.ZU;2-3
Abstract
A novel micro-mirror for vertical optical output has been successfully fabricated in a singlemode silica-based planar lightwave circuit (PLC ) on Si. An eight channel planar photodiode array was assembled on thi s PLC. The assembled PLC exhibited an average responsivity of 0.92 A/W and a responsivity deviation of 0.34dB at a wavelength of 1.31 mu m.