SPACE-CHARGE FORMATION AND RELAXATION IN ION-BOMBARDED POLY(IMIDE) KAPTON FILMS

Authors
COSTANTINI JM SALVETAT JP BRISARD F CALS MP MARQUE JP ISSAC F
Citation
Jm. Costantini et al., SPACE-CHARGE FORMATION AND RELAXATION IN ION-BOMBARDED POLY(IMIDE) KAPTON FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 116(1-4), 1996, pp. 496-501
Citations number
20
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
116
Issue
1-4
Year of publication
1996
Pages
496 - 501
Database
ISI
SICI code
0168-583X(1996)116:1-4<496:SFARII>2.0.ZU;2-N
Abstract
The space charge formation and relaxation in poly(imide) Kapton thin f ilms, deep-implanted with heavy ions in the MeV amu(-1) range, have be en studied by on-line measurements, with the pressure wave propagation method. The measured space charge depth profiles correspond to the da mage depth profiles due to the nuclear collisions. The space charge bu ildup in the bulk thus seems to be linked to some end-of-range defects acting as trapping sites. Ionization-induced defects seem to play a n egligible role in the formation of the bulk space charge.