CONSTRUCTION OF A PLASMA POLYMERIZATION REACTOR SYSTEM FOR LABORATORYUSE

A parallel-plate plasma polymerization reactor operating at radio freq uency was constructed. The reactor is suitable for reproducible plasma deposition of ultrathin pinhole-free polymer layers onto various supp orts. Feed gas composition, plasma power, total gas flow, pressure, an d substrate temperature can be selected independently of each other. T he radio-frequency voltage applied to the excitation electrode can be measured. Optical plasma emissions registered by a spectroscope may be used to monitor the plasma process. (C) 1996 John Wiley & Sons, Inc.