SHADOWED SPUTTERING OF GOLD ON V-SHAPED MICROTRENCHES ETCHED IN SILICON AND APPLICATIONS IN MICROFABRICATION

Authors
XIA YN WHITESIDES GM
Citation
Yn. Xia et Gm. Whitesides, SHADOWED SPUTTERING OF GOLD ON V-SHAPED MICROTRENCHES ETCHED IN SILICON AND APPLICATIONS IN MICROFABRICATION, Advanced materials, 8(9), 1996, pp. 765
Citations number
26
Categorie Soggetti
Material Science
Journal title
Advanced materials → ACNP
ISSN journal
09359648
Volume
8
Issue
9
Year of publication
1996
Database
ISI
SICI code
0935-9648(1996)8:9<765:SSOGOV>2.0.ZU;2-3
Abstract
Silicon micromachining has a wide range of applications in,for example , microelectronics. Here, a combination of several techniques is used in modifying the surface properties of V-shaped microtrenches (see Fig ure) and for fabricating complex surface relief structures.