X-RAY-ABSORPTION AND X-RAY PHOTOELECTRON SPECTROSCOPIC STUDIES OF AIR-OXIDIZED CHROMIUM NITRIDE THIN-FILMS

The surface oxidation of CrN thin films prepared by the cathode arc io n plating method was studied by X-ray absorption spectroscopy (XAS) an d X-ray photoelectron spectroscopy (XPS) using soft X-rays from synchr otron radiation. The results indicate that molecular nitrogen is forme d in the interstitial position of the chromium oxide matrix at the ini tial stage of oxidation. On further oxidation, at a higher temperature , molecular nitrogen is gradually released from the surface, with part of the displaced nitrogen remaining in the interstitial position.