TRIBOLOGICAL PROPERTIES OF RF PACVD AMORPHOUS B-N-C COATINGS

Amorphous BxNyCz:H films were prepared in a capacitively coupled r.f. PACVD reactor at deposition temperatures <200 degrees C starting from CH4-N-2-B2H6(10% in H-2) gas mixtures. Films were deposited on Si, ste el and glass substrates which were placed on the powered electrode. By varying the partial pressure of the gases, the composition was varied in a wide area of the B-N-C triangle. Tribological film properties (w ear and friction) were investigated by ball-on-disc testing under humi d N-2 (50% RH). B or N additions to pure diamond-like carbon films red uce the wear resistance, while the friction coefficient remains low (0 .2) and increases for BN-rich films (>0.5). These results are correlat ed with the coatings mechanical (depth-sensing indentation) and micros tructural (infrared spectroscopy) properties.