DEVELOPMENT OF A MESOSCALE NANOSCALE PLASMA GENERATOR/

We have developed a mesoscale/nanoscale discharge plasma generator, wh ich consists of two electrodes with an ultrasmall, gap on the mesoscal e/nanoscale controlled by two piezoelectric actuators and a Langmuir p lasma probe system housed in a high-pressure chamber. By means of this apparatus, the mesoscale/nanoscale N-2 and air plasmas in the range b etween 10 mu m and 800 nm have been realized. Moreover, Langmuir probe measurements revealed an interesting characteristic, namely a non-equ ilibrium cold nature of the plasmas, even in high-pressure environment s.