INFRARED-ABSORPTION IN SILICON FROM SHALLOW THERMAL DONORS INCORPORATING HYDROGEN AND A LINK TO THE NL10 PARAMAGNETIC-RESONANCE SPECTRUM

Shallow thermal donors (STDs), generated in Czochralski silicon, annea led at 470 degrees C in a hydrogen plasma, and detected by their infra red (IR) electronic absorption, have ground states that shift slightly (similar to 0.1 cm(-1)) to smaller binding energies, when deuterium i s introduced instead of hydrogen, demonstrating the presence of a hydr ogen atom in the donor core. No other IR spectrum is detected apart fr om that from neutral double thermal donors (TDs). The same optical tra nsitions are observed in three annealed samples given a preheat treatm ent in water vapor. These latter samples show the NL10 electron-parama gnetic-resonance (EPR) spectrum, recently attributed to hydrogen passi vated TDs. The relative strengths of the EPR NL10 spectra correlate wi th those of the STD IR spectra, providing a strong indication that bot h spectra arise from the same defects.