J. Kaczanowski et al., MONTE-CARLO SIMULATION OF CHANNELING SPECTRA FOR COMPOUND-CRYSTALS WITH POINT-DEFECTS AND CRYSTALLINE PRECIPITATES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 117(3), 1996, pp. 275-282
The Monte Carlo program was developed for calculation of ion trajector
ies and channeling spectrum synthesis. The program was adapted for the
analysis of channeling spectra of compound crystals containing point
defects and crystalline precipitates. The method of the ion trajectory
simulation and spectrum synthesis under the above condition is discus
sed in detail. The program was applied to the structure analysis of Ga
As crystals doped with Er and codoped with C and O. The present analys
is has determined the lattice location of Er in GaAs:Er-C and GaAs:Er-
O. The simulations also revealed the formation of ErAs crystalline pre
cipitates in Er heavily doped GaAs crystal which is consistent with TE
M observation.