MONTE-CARLO SIMULATION OF CHANNELING SPECTRA FOR COMPOUND-CRYSTALS WITH POINT-DEFECTS AND CRYSTALLINE PRECIPITATES

The Monte Carlo program was developed for calculation of ion trajector ies and channeling spectrum synthesis. The program was adapted for the analysis of channeling spectra of compound crystals containing point defects and crystalline precipitates. The method of the ion trajectory simulation and spectrum synthesis under the above condition is discus sed in detail. The program was applied to the structure analysis of Ga As crystals doped with Er and codoped with C and O. The present analys is has determined the lattice location of Er in GaAs:Er-C and GaAs:Er- O. The simulations also revealed the formation of ErAs crystalline pre cipitates in Er heavily doped GaAs crystal which is consistent with TE M observation.