DEPTH PROFILE OF IMPLANTED SPECIES WITH A DETECTOR TELESCOPE

Conventional elastic recoil detection analysis (ERDA) is considered to be an ideal nondestructive technique for depth profiling of implanted species of light mass elements in a material, The present work shows that it can lead to inaccurate misleading results in the cases where t he implanted sample has surface impurity of nearby light mass element. It is also shown that the detector telescope behind the stopper foil in ERDA allows accurate profiling of implanted specimen as well as sur face impurities simultaneously. (C) 1996 American Institute of Physics .