HIGH-SPEED ATOMIC-FORCE MICROSCOPY USING AN INTEGRATED ACTUATOR AND OPTICAL-LEVER DETECTION

Citation
Sr. Manalis et al., HIGH-SPEED ATOMIC-FORCE MICROSCOPY USING AN INTEGRATED ACTUATOR AND OPTICAL-LEVER DETECTION, Review of scientific instruments, 67(9), 1996, pp. 3294-3297
Citations number
11
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
ISSN journal
00346748
Volume
67
Issue
9
Year of publication
1996
Pages
3294 - 3297
Database
ISI
SICI code
0034-6748(1996)67:9<3294:HAMUAI>2.0.ZU;2-1
Abstract
A new procedure for high-speed imaging with the atomic force microscop e that combines an integrated ZnO piezoelectric actuator with an optic al lever sensor has yielded an imaging bandwidth of 33 kHz. This bandw idth is primarily limited by a mechanical resonance of 77 kHz when the cantilever is placed in contact with a surface. Images scanned with a tip velocity of 1 cm/s have been obtained in the constant force mode by using the optical lever to measure the cantilever stress. This is a ccomplished by subtracting an unwanted deflection produced by the actu ator from the net deflection measured by the photodiode using a linear correction circuit. We have verified that the tip/sample force is con stant by monitoring the cantilever stress with an implanted piezoresis tor. (C) 1996 American Institute of Physics.