Sr. Manalis et al., HIGH-SPEED ATOMIC-FORCE MICROSCOPY USING AN INTEGRATED ACTUATOR AND OPTICAL-LEVER DETECTION, Review of scientific instruments, 67(9), 1996, pp. 3294-3297
A new procedure for high-speed imaging with the atomic force microscop
e that combines an integrated ZnO piezoelectric actuator with an optic
al lever sensor has yielded an imaging bandwidth of 33 kHz. This bandw
idth is primarily limited by a mechanical resonance of 77 kHz when the
cantilever is placed in contact with a surface. Images scanned with a
tip velocity of 1 cm/s have been obtained in the constant force mode
by using the optical lever to measure the cantilever stress. This is a
ccomplished by subtracting an unwanted deflection produced by the actu
ator from the net deflection measured by the photodiode using a linear
correction circuit. We have verified that the tip/sample force is con
stant by monitoring the cantilever stress with an implanted piezoresis
tor. (C) 1996 American Institute of Physics.