METAL MICROTIP FABRICATION TECHNIQUES

Authors
MEYER R
Citation
R. Meyer, METAL MICROTIP FABRICATION TECHNIQUES, Le Vide, 52(282), 1996, pp. 478
Citations number
4
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Le Vide → ACNP
ISSN journal
12660167
Volume
52
Issue
282
Year of publication
1996
Database
ISI
SICI code
1266-0167(1996)52:282<478:MMFT>2.0.ZU;2-I
Abstract
In this paper we describe the so-called << Spindt >> process for the f abrication of microtips and discuss its application to Field Emission Displays. Extension to targe area fabrication is also presented.