HIGHLY UNIFORM AND REPRODUCIBLE VERTICAL-CAVITY SURFACE-EMITTING LASERS GROWN BY METALORGANIC VAPOR-PHASE EPITAXY WITH IN-SITU REFLECTOMETRY

Vertical-cavity surface-emitting lasers (VCSEL's) were grown by metalo rganic vapor phase epitaxy, Excellent uniformity of Fabry-Perot cavity wavelength for VCSEL materials of +/-0.2% across a 3-in diameter wafe r was achieved, This results in excellent uniformity of the lasing wav elength and threshold current of VCSEL devices. Employing pregrowth ca librations on growth rates periodically with an ill situ reflectometer , we obtained a run-to-run wavelength reproducibility for 770- and 850 -nm VCSEL's of +/-0.3% over the course of more than a hundred runs.