ENERGETIC CLUSTER-IMPACT (ECI) - A NEW METHOD FOR THIN-FILM FORMATION

Authors
HABERLAND H MOSELER M QIANG Y RATTUNDE O REINERS T THURNER Y
Citation
H. Haberland et al., ENERGETIC CLUSTER-IMPACT (ECI) - A NEW METHOD FOR THIN-FILM FORMATION, Surface review and letters, 3(1), 1996, pp. 887-890
Citations number
12
Categorie Soggetti
Physics, Condensed Matter","Physics, Atomic, Molecular & Chemical","Material Science
Journal title
Surface review and letters → ACNP
ISSN journal
0218625X
Volume
3
Issue
1
Year of publication
1996
Pages
887 - 890
Database
ISI
SICI code
0218-625X(1996)3:1<887:EC(-AN>2.0.ZU;2-L
Abstract
A completely ionized beam of metal clusters is deposited with variable kinetic energy on a substrate. Mirror-like and strongly adhering film s having unusual properties are produced for sufficiently high cluster impact energies. Numerical simulations provide the physical insight w hy this novel technique gives different, and sometimes superior result s compared to conventional methods. Several examples are presented.