LINEAR MICROVIBROMOTOR FOR POSITIONING OPTICAL-COMPONENTS

We report an electrostatically driven linear microvibromotor fabricate d using surface-micromachining technology. This device is developed fo r use in actuated micro-optical systems on silicon. Its submicron posi tioning resolution and a travel range of over 350 mu m are excellent p roperties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation o f the vibromotor dynamics is presented to explore optimization and con trol issues for this device.