FORMATION OF AMORPHOUS-CARBON CONTAINING SILICON FROM A NEW ORGANOSILICON PRECURSOR

Amorphous carbon in membrane form containing a small amount of silicon uniformly in the structure was prepared by firing a new organosilicon precursor, henylsilylene)-ethynylene-1,3-phenylene-ethynylene (MSP). The pyrolyzed products look like glassy carbon. The cross-linking proc esses before pyrolysis were effective to keep its share during the hea t treatment and were influenced by oxygen in an ambient atmosphere dup ing cross-linking processes. The oxygen introduced into the precursor enhanced the cross-linking but decreased the residual weight after the pyrolysis. In the pyrolyzed products, silicon atoms appeared to distr ibute uniformly from the outer surface to interior core. The structure of the products was amorphous, but beta-SiC precipitated beyond 1873 K.