Vp. Parkhutik et al., MECHANISM OF AC ELECTRICAL-TRANSPORT OF CARRIERS IN FRESHLY FORMED AND AGED POROUS SILICON, Journal of the Electrochemical Society, 143(12), 1996, pp. 3943-3949
Electrical impedance of aging porous silicon layers (PS) was studied a
pplying the regime df temperature cycling (from -50 to +150 degrees C)
in a range of alternating current (a.c.) frequencies 0.2 to 10(5) Hz
(amplitude 1 V). Freshly obtained PS exhibits changes of electrical pr
operties at temperatures above 50 degrees C, presumably associated wit
h the escape of electrolyte from the pores. A.C. electrical conductivi
ty of PS is very sensitive to its postanodizing treatments (heat-treat
ment, pore filling by inert electrolyte, evacuation at increased tempe
ratures, annealing in nitrogen). Activation energy for the electrical
conduction ranges from 0.1 to 0.23 eV depending on a.c. frequency and
postanodizing treatments. An electric equivalent circuit was designed
to fit the experimental data acquired at differently treated PS sample
s. The components of the equivalent circuit were assigned to physical
elements of PS (a surface phase on top of PS and a layer of underlying
bulk material). Based on the measurements bf the electrical impedance
and chemical composition of PS films the mechanism of electrical cond
uction is assumed to be a charge carrier migration through the localiz
ed states associated with the surface impurities (hydrides and/or oxid
es of silicon). The obtained impedance data show the strong influence
of residuals of the electrolyte inside the pores of freshly prepared P
S on its aging stability.