HIGH-RESOLUTION MEASUREMENT OF RESISTIVITY VARIATIONS IN POWER DEVICES BY THE PHOTOSCANNING METHOD

Authors
SCHULZE HJ LUDGE A RIEMANN H
Citation
Hj. Schulze et al., HIGH-RESOLUTION MEASUREMENT OF RESISTIVITY VARIATIONS IN POWER DEVICES BY THE PHOTOSCANNING METHOD, Journal of the Electrochemical Society, 143(12), 1996, pp. 4105-4108
Citations number
10
Categorie Soggetti
Electrochemistry
Journal title
Journal of the Electrochemical Society → ACNP
ISSN journal
00134651
Volume
143
Issue
12
Year of publication
1996
Pages
4105 - 4108
Database
ISI
SICI code
0013-4651(1996)143:12<4105:HMORVI>2.0.ZU;2-3
Abstract
In order to obtain high breakdown voltages, power devices require a th ick n-type layer with high resistivity and high carrier Lifetime. Ther efore, contamination with shallow level impurities which change the st arting resistivity can result in an undesireable reduction of the bloc king voltage. To detect such resistivity variations, a photoscanning m ethod with high spatial resolution was used.