DEPOSITION OF INORGANIC COATINGS BY GAS-PHASE DECOMPOSITION OF METAL BETA-DIKETONATES

Authors
DYAGILEVA LM TSYGANOVA EI
Citation
Lm. Dyagileva et Ei. Tsyganova, DEPOSITION OF INORGANIC COATINGS BY GAS-PHASE DECOMPOSITION OF METAL BETA-DIKETONATES, Russian journal of applied chemistry, 69(2), 1996, pp. 155-162
Citations number
55
Categorie Soggetti
Chemistry Applied
Journal title
Russian journal of applied chemistry → ACNP
ISSN journal
10704272
Volume
69
Issue
2
Year of publication
1996
Pages
155 - 162
Database
ISI
SICI code
1070-4272(1996)69:2<155:DOICBG>2.0.ZU;2-D
Abstract
The studies carried out in Soviet Union and Russia on thermolysis and photolysis of metal beta-diketonates and chemical vapor deposition of inorganic coatings from these compounds are reviewed. Methods for prep aring metallic, oxide, and composite coatings under dynamic conditions in inert, reducing, and oxidizing atmospheres are discussed.