Lm. Dyagileva et Ei. Tsyganova, DEPOSITION OF INORGANIC COATINGS BY GAS-PHASE DECOMPOSITION OF METAL BETA-DIKETONATES, Russian journal of applied chemistry, 69(2), 1996, pp. 155-162
The studies carried out in Soviet Union and Russia on thermolysis and
photolysis of metal beta-diketonates and chemical vapor deposition of
inorganic coatings from these compounds are reviewed. Methods for prep
aring metallic, oxide, and composite coatings under dynamic conditions
in inert, reducing, and oxidizing atmospheres are discussed.