SCREENING OF VARIABLES FOR THE EMPIRICAL MODELING OF SEMICONDUCTOR-DEVICES

Authors
SPREVAK D FERGUSON RS WALTON AJ FALLON M NEWSAM MI
Citation
D. Sprevak et al., SCREENING OF VARIABLES FOR THE EMPIRICAL MODELING OF SEMICONDUCTOR-DEVICES, IEE proceedings. Science, measurement and technology, 143(5), 1996, pp. 319-326
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
IEE proceedings. Science, measurement and technology → ACNP
ISSN journal
13502344
Volume
143
Issue
5
Year of publication
1996
Pages
319 - 326
Database
ISI
SICI code
1350-2344(1996)143:5<319:SOVFTE>2.0.ZU;2-O
Abstract
A strategy for screening the important effects in a multivariable resp onse function is presented. An optimisation algorithm is developed, wh ich searches for the optimum of the function in the subspace of the im portant variables, The application of these methods is illustrated wit h a known nonlinear 23 variable function, The technique is applied to the design of an NMOS process which depends on 35 factors.