ELLIPSOMETRY OF LIGHT-SCATTERING FROM MULTILAYER COATINGS

Authors
DEUMIE C GIOVANNINI H AMRA C
Citation
C. Deumie et al., ELLIPSOMETRY OF LIGHT-SCATTERING FROM MULTILAYER COATINGS, Applied optics, 35(28), 1996, pp. 5600-5608
Citations number
17
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
35
Issue
28
Year of publication
1996
Pages
5600 - 5608
Database
ISI
SICI code
0003-6935(1996)35:28<5600:EOLFMC>2.0.ZU;2-K
Abstract
A scatterometer is extended and allows us to perform ellipsometric mea surements on scattered light in each direction of space. Experimental data are given for single thin-film layers and optical coatings and re veal unexpected results. The phenomena are investigated by means of th e electromagnetic theories of surface and bulk scattering that emphasi ze the role of partial correlation and localized defects. (C) 1996 Opt ical Society of America