TERAHERTZ WAVE-GUIDE COMPONENTS FABRICATED USING A 3D X-RAY MICROFABRICATION TECHNIQUE

Authors
MOON SW MANN CM MADDISON BJ TURCU ICE ALLOT R HUQ SE LISI N
Citation
Sw. Moon et al., TERAHERTZ WAVE-GUIDE COMPONENTS FABRICATED USING A 3D X-RAY MICROFABRICATION TECHNIQUE, Electronics Letters, 32(19), 1996, pp. 1794-1795
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
32
Issue
19
Year of publication
1996
Pages
1794 - 1795
Database
ISI
SICI code
0013-5194(1996)32:19<1794:TWCFUA>2.0.ZU;2-#
Abstract
A novel process using embedded x-ray masks that allows the fabrication of 3D terahertz waveguide components is demonstrated. X-rays produced by a laser plasma source are used to expose a chenically amplified re sist. To produce structures with the required depth (similar to 50 mu m) a cyclic exposure and development technique is used. A representati ve waveguide cavity intended for operation at 2.5THz is realised.