PARTICULATES ON PULSED-LASER DEPOSITED Y-BA-CU-O FILMS

Different types of particulates observed on high temperature supercond ucting Y-Ba-Cu-O films prepared by pulsed-laser deposition on MgO subs trates are investigated as a function of deposition parameters and cla ssified according to their size, shape, and chemical composition. Amon g the parameters studied in detail are the oxygen pressure, the substr ate temperature, the laser energy, fluence, spot size, and the number of pulses. The interrelations between the different particulates, the ablation and deposition rates, the shape of the visible plasma plume, and the film properties have been investigated.