FORMATION OF LITHOGRAPHIC METALLIC HETERO-CONTACTS

Citation
Nn. Gribov et al., FORMATION OF LITHOGRAPHIC METALLIC HETERO-CONTACTS, Physica. B, Condensed matter, 218(1-4), 1996, pp. 97-100
Citations number
9
Categorie Soggetti
Physics, Condensed Matter
ISSN journal
09214526
Volume
218
Issue
1-4
Year of publication
1996
Pages
97 - 100
Database
ISI
SICI code
0921-4526(1996)218:1-4<97:FOLMH>2.0.ZU;2-B
Abstract
We have made an electron-microscopy study of nanoholes in membranes in successive stages of one-sided deposition of Au and Ag, as is relevan t for hetero-contacts. Key results are: (i) the holes are not filled d uring deposition and (ii) closing of the holes is by lateral growth of the film on the membrane.