A theoretical investigation has been made of carrier fluctuation noise
in an n-type quantized inversion channel on a (100) Si surface due to
phonon-induced intervalley scattering of electrons, We have derived a
n equation for the correlation function of fluctuations of one-particl
e-state occupation numbers in an arbitrary valley of a conduction band
. On its base we have obtained an analytical expression for the spectr
al density of intervalley fluctuations in the case of nonelastic elect
ron scattering by phonons. It is shown that if the temperature is not
too low the main contribution to the intervalley noise is brought in b
y electron transitions allowed by the symmetry selection rules in the
zero order of the phonon wave vector. We have found that the intervall
ey noise spectrum has a Lorentzian form similar to that of the generat
ion-recombination noise. Our calculations show that at microwave frequ
encies the intervalley noise power can considerably exceed the power o
f the thermal noise due to intravalley scattering processes.