P. Lotton et al., THEORETICAL-MODELS TO DESCRIBE THE COUPLI NG BETWEEN VIBRATING MEMBRANES AND THIN GAS LAYERS, Comptes rendus de l'Academie des sciences. Serie II. Mecanique, physique, chimie, astronomie, 322(6), 1996, pp. 469-475
Theoretical models to describe the behaviour of membranes or plates lo
aded by gas films have recently been developed (Bruneau, 1993, 1994).
The conventional models (Skvor, 1991) used to describe the behaviour o
f electrostatic or piezoelectric microphones or loudspeakers are impro
ved in that several effects usually neglected al-e taken into account
in order to obtain the accurate models that are required by the curren
t level of miniaturization and by new devices and applications, especi
ally in the high-frequency range (up to 100 kHz and more). The aim of
this paper is to present and compare the results obtained from the dif
ferent models.