SEM STUDIES DOUBLE-LAYER SILICON STRUCTUR ES PREPARED BY EPITAXY AND DIRECT BONDING

Authors
GOVORKOV AV ENISHERLOVA KL MILVIDSKII MG
Citation
Av. Govorkov et al., SEM STUDIES DOUBLE-LAYER SILICON STRUCTUR ES PREPARED BY EPITAXY AND DIRECT BONDING, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 60(2), 1996, pp. 8-13
Citations number
5
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
60
Issue
2
Year of publication
1996
Pages
8 - 13
Database
ISI
SICI code
0367-6765(1996)60:2<8:SSDSSE>2.0.ZU;2-Q