SOME ASPECTS OF SEM PROFILOMETRY IN THE B ACKSCATTERING ELECTRON MODE

Authors
DREOMOVA NN RAU EI YAKIMOV EB
Citation
Nn. Dreomova et al., SOME ASPECTS OF SEM PROFILOMETRY IN THE B ACKSCATTERING ELECTRON MODE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 60(2), 1996, pp. 101-104
Citations number
12
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
60
Issue
2
Year of publication
1996
Pages
101 - 104
Database
ISI
SICI code
0367-6765(1996)60:2<101:SAOSPI>2.0.ZU;2-T