LINEAR MEASUREMENTS IN SUBMICRON RANGE ON SEM

Authors
NOVIKOV YA RAKOV AV STRIZHKOV IB SEDOV SV
Citation
Ya. Novikov et al., LINEAR MEASUREMENTS IN SUBMICRON RANGE ON SEM, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 60(2), 1996, pp. 105-111
Citations number
14
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
60
Issue
2
Year of publication
1996
Pages
105 - 111
Database
ISI
SICI code
0367-6765(1996)60:2<105:LMISRO>2.0.ZU;2-J